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Effect of gas phase on SiC and Si3N4 formations from SiO2.

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Bibliographic Details
Title: Effect of gas phase on SiC and Si3N4 formations from SiO2.
Authors: Wada, H., Wang, L.
Source: Journal of Materials Science; March 15 1992, Vol. 27, p1528-1536, 9p
Database: Applied Science & Technology Source
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