Rapid thermal processing of zinc diffusion in indium phosphide.
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| Title: | Rapid thermal processing of zinc diffusion in indium phosphide. |
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| Authors: | Schade, U., Enders, P. |
| Source: | Semiconductor Science & Technology; June 1992, Vol. 7, p752-757, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
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| DOI: | 10.1088/0268-1242/7/6/006 |