Selective etching of gallium arsenide crystals in H2SO4-H2O2-H2O system.
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| Title: | Selective etching of gallium arsenide crystals in H2SO4-H2O2-H2O system. |
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| Authors: | Iida, S., Ito, K. |
| Source: | Journal of the Electrochemical Society; May 1971, Vol. 118, p768-771, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2408161 |
