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Selective etching of gallium arsenide crystals in H2SO4-H2O2-H2O system.

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Bibliographic Details
Title: Selective etching of gallium arsenide crystals in H2SO4-H2O2-H2O system.
Authors: Iida, S., Ito, K.
Source: Journal of the Electrochemical Society; May 1971, Vol. 118, p768-771, 4p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 516487308
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Label: Title
  Group: Ti
  Data: Selective etching of gallium arsenide crystals in H2SO4-H2O2-H2O system.
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  Label: Authors
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  Data: <searchLink fieldCode="AU" term="%22Iida%2C+S%2E%22">Iida, S.</searchLink><br /><searchLink fieldCode="AU" term="%22Ito%2C+K%2E%22">Ito, K.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; May 1971, Vol. 118, p768-771, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=516487308
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1149/1.2408161
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 768
    Titles:
      – TitleFull: Selective etching of gallium arsenide crystals in H2SO4-H2O2-H2O system.
        Type: main
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      – PersonEntity:
          Name:
            NameFull: Iida, S.
      – PersonEntity:
          Name:
            NameFull: Ito, K.
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          Dates:
            – D: 03
              M: 08
              Text: May 1971
              Type: published
              Y: 1971
          Identifiers:
            – Type: issn-print
              Value: 00134651
          Numbering:
            – Type: volume
              Value: 118
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
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