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Selective etching of gallium arsenide crystals in H2SO4-H2O2-H2O system.

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Bibliographic Details
Title: Selective etching of gallium arsenide crystals in H2SO4-H2O2-H2O system.
Authors: Iida, S., Ito, K.
Source: Journal of the Electrochemical Society; May 1971, Vol. 118, p768-771, 4p
Database: Applied Science & Technology Source
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