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Gas incorporation into sputtered films.

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Bibliographic Details
Title: Gas incorporation into sputtered films.
Authors: Winters, H. F., Kay, E.
Source: Journal of Applied Physics; September 1967, Vol. 38, p3928-3934, 7p
Database: Applied Science & Technology Source
Description
ISSN:00218979
DOI:10.1063/1.1709043