Mask preparation for small dimension ion milling by two step lift-off process.
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| Title: | Mask preparation for small dimension ion milling by two step lift-off process. |
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| Authors: | Wada, O. |
| Source: | Journal of the Electrochemical Society; June 1977, Vol. 124, p959-960, 2p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2133465 |
