APA (7th ed.) Citation

Wada, O. (1977). Mask preparation for small dimension ion milling by two step lift-off process. Journal of the Electrochemical Society, 124, 959. https://doi.org/10.1149/1.2133465

Chicago Style (17th ed.) Citation

Wada, O. "Mask Preparation for Small Dimension Ion Milling by Two Step Lift-off Process." Journal of the Electrochemical Society 124 (1977): 959. https://doi.org/10.1149/1.2133465.

MLA (9th ed.) Citation

Wada, O. "Mask Preparation for Small Dimension Ion Milling by Two Step Lift-off Process." Journal of the Electrochemical Society, vol. 124, 1977, p. 959, https://doi.org/10.1149/1.2133465.