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Mask preparation for small dimension ion milling by two step lift-off process.

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Bibliographic Details
Title: Mask preparation for small dimension ion milling by two step lift-off process.
Authors: Wada, O.
Source: Journal of the Electrochemical Society; June 1977, Vol. 124, p959-960, 2p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 516904148
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Mask preparation for small dimension ion milling by two step lift-off process.
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RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1149/1.2133465
    Languages:
      – Code: eng
        Text: English
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        PageCount: 2
        StartPage: 959
    Titles:
      – TitleFull: Mask preparation for small dimension ion milling by two step lift-off process.
        Type: main
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            NameFull: Wada, O.
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          Dates:
            – D: 01
              M: 06
              Text: June 1977
              Type: published
              Y: 1977
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              Value: 00134651
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              Value: 124
          Titles:
            – TitleFull: Journal of the Electrochemical Society
              Type: main
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