Low-temperature film thickness measurements by a quartz thickness monitor.
Saved in:
| Title: | Low-temperature film thickness measurements by a quartz thickness monitor. |
|---|---|
| Authors: | Barrett, P. H., Pasternak, M. |
| Source: | Journal of Applied Physics; July 1977, Vol. 48, p3116-3117, 2p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
|---|---|
| DOI: | 10.1063/1.324083 |
