APA (7th ed.) Citation

Barrett, P. H., & Pasternak, M. (1977). Low-temperature film thickness measurements by a quartz thickness monitor. Journal of Applied Physics, 48, 3116. https://doi.org/10.1063/1.324083

Chicago Style (17th ed.) Citation

Barrett, P. H., and M. Pasternak. "Low-temperature Film Thickness Measurements by a Quartz Thickness Monitor." Journal of Applied Physics 48 (1977): 3116. https://doi.org/10.1063/1.324083.

MLA (9th ed.) Citation

Barrett, P. H., and M. Pasternak. "Low-temperature Film Thickness Measurements by a Quartz Thickness Monitor." Journal of Applied Physics, vol. 48, 1977, p. 3116, https://doi.org/10.1063/1.324083.