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High-Frequency Performance of Self-Aligned Gate-Last Surface Channel \In0.53\Ga0.47\As MOSFET.

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Bibliographic Details
Title:	High-Frequency Performance of Self-Aligned Gate-Last Surface Channel \In0.53\Ga0.47\As MOSFET.
Authors:	Egard, Mikael¹, Ohlsson, Lars², Arlelid, Mats², Persson, Karl-Magnus², Borg, B. Mattias¹, Lenrick, Filip³, Wallenberg, Reine⁴, Lind, Erik⁵, Wernersson, Lars-Erik²
Source:	IEEE Electron Device Letters; Mar2012, Vol. 33 Issue 3, p369-371, 3p
Database:	Applied Science & Technology Source

Description
ISSN:	07413106
DOI:	10.1109/LED.2011.2181323