Ultraviolet laser excited adsorbate-surface interactions: NH3, C2H4, and CH2I2 on Al and oxidized Al surfaces.
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| Title: | Ultraviolet laser excited adsorbate-surface interactions: NH3, C2H4, and CH2I2 on Al and oxidized Al surfaces. |
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| Authors: | Chuang, T. J.1, Domen, K.1 |
| Source: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1989, Vol. 7 Issue 5, p1200-1207, 8p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0734211X |
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| DOI: | 10.1116/1.584572 |
