Hydrogen passivation of polycrystalline silicon thin films.
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| Title: | Hydrogen passivation of polycrystalline silicon thin films. |
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| Authors: | Scheller, L.-P.1, Weizman, M.1, Simon, P.1, Fehr, M.1, Nickel, N. H.1 |
| Source: | Journal of Applied Physics; Sep2012, Vol. 112 Issue 6, p063711, 8p, 1 Chart, 7 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.4752268 |