Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects.
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| Title: | Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects. |
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| Authors: | Pöller, Franziska1 franziska.poeller@tum.de, Salazar Bloise, Félix2 felixjose.salazar@upm.es, Jakobi, Martin1 shengjia.wang@tum.de, Wang, Shengjia1 jie.dong@tum.de, Dong, Jie1 a.w.koch@tum.de, Koch, Alexander W.1 |
| Source: | Sensors (14248220). May2019, Vol. 19 Issue 10, p2215. 1p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 14248220 |
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| DOI: | 10.3390/s19102215 |
