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Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects.

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Title: Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects.
Authors: Pöller, Franziska1 franziska.poeller@tum.de, Salazar Bloise, Félix2 felixjose.salazar@upm.es, Jakobi, Martin1 shengjia.wang@tum.de, Wang, Shengjia1 jie.dong@tum.de, Dong, Jie1 a.w.koch@tum.de, Koch, Alexander W.1
Source: Sensors (14248220). May2019, Vol. 19 Issue 10, p2215. 1p.
Database: Academic Search Ultimate
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