Robust Co alloy design for Co interconnects using a self-forming barrier layer.
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| Title: | Robust Co alloy design for Co interconnects using a self-forming barrier layer. |
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| Authors: | Kim, Cheol1 (AUTHOR), Kang, Geosan1 (AUTHOR), Jung, Youngran1 (AUTHOR), Kim, Ji-Yong1 (AUTHOR), Lee, Gi-Baek1 (AUTHOR), Hong, Deokgi1 (AUTHOR), Lee, Yoongu1 (AUTHOR), Hwang, Soon-Gyu1 (AUTHOR), Jung, In-Ho1 (AUTHOR), Joo, Young-Chang1,2 (AUTHOR) ycjoo@snu.ac.kr |
| Source: | Scientific Reports. 7/19/2022, Vol. 12 Issue 1, p1-9. 9p. |
| Database: | Academic Search Ultimate |
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