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Lens-free reflective topography for high-resolution wafer inspection.

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Bibliographic Details
Title: Lens-free reflective topography for high-resolution wafer inspection.
Authors: Lee, Hojun1 (AUTHOR) hojun86.lee@samsung.com, Sung, Jangwoon1 (AUTHOR), Park, Seungbeom1 (AUTHOR), Shin, Junho1 (AUTHOR), Kim, Hyungjin1 (AUTHOR), Kim, Wookrae1 (AUTHOR), Lee, Myungjun1 (AUTHOR)
Source: Scientific Reports. 5/8/2024, Vol. 14 Issue 1, p1-13. 13p.
Database: Academic Search Ultimate
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Description
ISSN:20452322
DOI:10.1038/s41598-024-59496-4