APA (7th ed.) Citation

Lee, H., Sung, J., Park, S., Shin, J., Kim, H., Kim, W., & Lee, M. (2024). Lens-free reflective topography for high-resolution wafer inspection. Scientific Reports, 14(1), 1. https://doi.org/10.1038/s41598-024-59496-4

Chicago Style (17th ed.) Citation

Lee, Hojun, Jangwoon Sung, Seungbeom Park, Junho Shin, Hyungjin Kim, Wookrae Kim, and Myungjun Lee. "Lens-free Reflective Topography for High-resolution Wafer Inspection." Scientific Reports 14, no. 1 (2024): 1. https://doi.org/10.1038/s41598-024-59496-4.

MLA (9th ed.) Citation

Lee, Hojun, et al. "Lens-free Reflective Topography for High-resolution Wafer Inspection." Scientific Reports, vol. 14, no. 1, 2024, p. 1, https://doi.org/10.1038/s41598-024-59496-4.