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Lens-free reflective topography for high-resolution wafer inspection.

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Title: Lens-free reflective topography for high-resolution wafer inspection.
Authors: Lee, Hojun1 (AUTHOR) hojun86.lee@samsung.com, Sung, Jangwoon1 (AUTHOR), Park, Seungbeom1 (AUTHOR), Shin, Junho1 (AUTHOR), Kim, Hyungjin1 (AUTHOR), Kim, Wookrae1 (AUTHOR), Lee, Myungjun1 (AUTHOR)
Source: Scientific Reports. 5/8/2024, Vol. 14 Issue 1, p1-13. 13p.
Database: Academic Search Ultimate
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Header DbId: asn
DbLabel: Academic Search Ultimate
An: 177112808
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PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Lens-free reflective topography for high-resolution wafer inspection.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AR" term="%22Lee%2C+Hojun%22">Lee, Hojun</searchLink><relatesTo>1</relatesTo> (AUTHOR)<i> hojun86.lee@samsung.com</i><br /><searchLink fieldCode="AR" term="%22Sung%2C+Jangwoon%22">Sung, Jangwoon</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Park%2C+Seungbeom%22">Park, Seungbeom</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Shin%2C+Junho%22">Shin, Junho</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kim%2C+Hyungjin%22">Kim, Hyungjin</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kim%2C+Wookrae%22">Kim, Wookrae</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Lee%2C+Myungjun%22">Lee, Myungjun</searchLink><relatesTo>1</relatesTo> (AUTHOR)
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Scientific+Reports%22">Scientific Reports</searchLink>. 5/8/2024, Vol. 14 Issue 1, p1-13. 13p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=177112808
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1038/s41598-024-59496-4
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 13
        StartPage: 1
    Titles:
      – TitleFull: Lens-free reflective topography for high-resolution wafer inspection.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Lee, Hojun
      – PersonEntity:
          Name:
            NameFull: Sung, Jangwoon
      – PersonEntity:
          Name:
            NameFull: Park, Seungbeom
      – PersonEntity:
          Name:
            NameFull: Shin, Junho
      – PersonEntity:
          Name:
            NameFull: Kim, Hyungjin
      – PersonEntity:
          Name:
            NameFull: Kim, Wookrae
      – PersonEntity:
          Name:
            NameFull: Lee, Myungjun
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 08
              M: 05
              Text: 5/8/2024
              Type: published
              Y: 2024
          Identifiers:
            – Type: issn-print
              Value: 20452322
          Numbering:
            – Type: volume
              Value: 14
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Scientific Reports
              Type: main
ResultId 1