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Resolution enhancement methods in optical microscopy for dimensional optical metrology.

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Bibliographic Details
Title: Resolution enhancement methods in optical microscopy for dimensional optical metrology.
Authors: Nouri, Mohammad1,2 (AUTHOR), Olivero, Paolo3 (AUTHOR), Kroker, Stefanie1,2 (AUTHOR), Käseberg, Tim2 (AUTHOR), Ruo-Berchera, Ivano4 (AUTHOR), Bodermann, Bernd2 (AUTHOR) bernd.bodermann@ptb.de, Tyagi, Himanshu5 (AUTHOR), Roy, Deb5 (AUTHOR), Mukherjee, Deshabrato6 (AUTHOR), Siefke, Thomas7 (AUTHOR), Hansen, Poul Erik8 (AUTHOR), Rømer, Astrid Tranum8 (AUTHOR), Valtr, Miroslav9 (AUTHOR), Aprà, Pietro10 (AUTHOR), Petrik, Peter6,11 (AUTHOR)
Source: Journal of the European Optical Society. 1/22/2025, Vol. 21 Issue 1, p1-20. 20p.
Database: Academic Search Ultimate
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ISSN:19902573
DOI:10.1051/jeos/2025002