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Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup.

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Bibliographic Details
Title: Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup.
Authors: Rodrigues, Manuel J. L. F.1 (AUTHOR) ines.garcia@inl.int, Garcia, Inês S.1 (AUTHOR), Santos, Joana D.1 (AUTHOR), Mota, Filipa C.1 (AUTHOR), Alves, Filipe S.1 (AUTHOR), Aguiam, Diogo E.1 (AUTHOR) diogo.aguiam@inl.int
Source: Sensors (14248220). Aug2025, Vol. 25 Issue 15, p4627. 12p.
Database: Academic Search Ultimate
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ISSN:14248220
DOI:10.3390/s25154627