APA (7th ed.) Citation

Rodrigues, M. J. L. F., Garcia, I. S., Santos, J. D., Mota, F. C., Alves, F. S., & Aguiam, D. E. (2025). Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup. Sensors (14248220), 25(15), 4627. https://doi.org/10.3390/s25154627

Chicago Style (17th ed.) Citation

Rodrigues, Manuel J. L. F., Inês S. Garcia, Joana D. Santos, Filipa C. Mota, Filipe S. Alves, and Diogo E. Aguiam. "Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup." Sensors (14248220) 25, no. 15 (2025): 4627. https://doi.org/10.3390/s25154627.

MLA (9th ed.) Citation

Rodrigues, Manuel J. L. F., et al. "Through Silicon MEMS Inspection with a Near-Infrared Laser Scanning Setup." Sensors (14248220), vol. 25, no. 15, 2025, p. 4627, https://doi.org/10.3390/s25154627.