Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing.
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| Title: | Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing. |
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| Authors: | Liu, Ze1 (AUTHOR), Lyu, Peng1 (AUTHOR) mnmt_lp@tju.edu.cn |
| Source: | Nanomanufacturing & Metrology. 3/10/2026, Vol. 9 Issue 1, p1-11. 11p. |
| Database: | Academic Search Ultimate |
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| ISSN: | 2520811X |
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| DOI: | 10.1007/s41871-026-00295-y |
