APA (7th ed.) Citation

Liu, Z., & Lyu, P. (2026). Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing. Nanomanufacturing & Metrology, 9(1), 1. https://doi.org/10.1007/s41871-026-00295-y

Chicago Style (17th ed.) Citation

Liu, Ze, and Peng Lyu. "Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing." Nanomanufacturing & Metrology 9, no. 1 (2026): 1. https://doi.org/10.1007/s41871-026-00295-y.

MLA (9th ed.) Citation

Liu, Ze, and Peng Lyu. "Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing." Nanomanufacturing & Metrology, vol. 9, no. 1, 2026, p. 1, https://doi.org/10.1007/s41871-026-00295-y.