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Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing.

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Bibliographic Details
Title: Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing.
Authors: Liu, Ze1 (AUTHOR), Lyu, Peng1 (AUTHOR) mnmt_lp@tju.edu.cn
Source: Nanomanufacturing & Metrology. 3/10/2026, Vol. 9 Issue 1, p1-11. 11p.
Database: Academic Search Ultimate
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  Data: Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing.
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  Data: <searchLink fieldCode="JN" term="%22Nanomanufacturing+%26+Metrology%22">Nanomanufacturing & Metrology</searchLink>. 3/10/2026, Vol. 9 Issue 1, p1-11. 11p.
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        Value: 10.1007/s41871-026-00295-y
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        Text: English
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      – TitleFull: Nearly Damage-Free Laser Crystal Processing by Integrating Inductively Coupled Plasma Modification with Low-Pressure Polishing.
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              Text: 3/10/2026
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              Y: 2026
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