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A Multiphysics-Coupled 3D Visualization Model for Controlling Ultrafast Laser-Induced Micro-Hole Morphology on Monocrystalline Silicon.

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Bibliographic Details
Title: A Multiphysics-Coupled 3D Visualization Model for Controlling Ultrafast Laser-Induced Micro-Hole Morphology on Monocrystalline Silicon.
Authors: Ran, Jingwen1 (AUTHOR), Zhang, Fan2 (AUTHOR), Chen, Chong1,2 (AUTHOR) chongchen@zju.edu.cn, Guan, Tianyu3 (AUTHOR), Wen, Bo4 (AUTHOR), Guo, Yijun1 (AUTHOR), Yao, Xiuyu5 (AUTHOR), Sun, Anyu2 (AUTHOR), Chen, Yuanliu2 (AUTHOR)
Source: Nanomanufacturing & Metrology. 3/26/2026, Vol. 9 Issue 1, p1-18. 18p.
Database: Academic Search Ultimate
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ISSN:2520811X
DOI:10.1007/s41871-026-00293-0