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A Multiphysics-Coupled 3D Visualization Model for Controlling Ultrafast Laser-Induced Micro-Hole Morphology on Monocrystalline Silicon.

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Title: A Multiphysics-Coupled 3D Visualization Model for Controlling Ultrafast Laser-Induced Micro-Hole Morphology on Monocrystalline Silicon.
Authors: Ran, Jingwen1 (AUTHOR), Zhang, Fan2 (AUTHOR), Chen, Chong1,2 (AUTHOR) chongchen@zju.edu.cn, Guan, Tianyu3 (AUTHOR), Wen, Bo4 (AUTHOR), Guo, Yijun1 (AUTHOR), Yao, Xiuyu5 (AUTHOR), Sun, Anyu2 (AUTHOR), Chen, Yuanliu2 (AUTHOR)
Source: Nanomanufacturing & Metrology. 3/26/2026, Vol. 9 Issue 1, p1-18. 18p.
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  Data: <searchLink fieldCode="AR" term="%22Ran%2C+Jingwen%22">Ran, Jingwen</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Zhang%2C+Fan%22">Zhang, Fan</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chen%2C+Chong%22">Chen, Chong</searchLink><relatesTo>1,2</relatesTo> (AUTHOR)<i> chongchen@zju.edu.cn</i><br /><searchLink fieldCode="AR" term="%22Guan%2C+Tianyu%22">Guan, Tianyu</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Wen%2C+Bo%22">Wen, Bo</searchLink><relatesTo>4</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Guo%2C+Yijun%22">Guo, Yijun</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Yao%2C+Xiuyu%22">Yao, Xiuyu</searchLink><relatesTo>5</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Sun%2C+Anyu%22">Sun, Anyu</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Chen%2C+Yuanliu%22">Chen, Yuanliu</searchLink><relatesTo>2</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22Nanomanufacturing+%26+Metrology%22">Nanomanufacturing & Metrology</searchLink>. 3/26/2026, Vol. 9 Issue 1, p1-18. 18p.
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