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Ablation of silicon suboxide thin layers.

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Bibliographic Details
Title: Ablation of silicon suboxide thin layers.
Authors: Jahn, M.1, Richter, J.1, Weichenhain-Schriever, R.1, Meinertz, J.1 joerg.meinertz@llg-ev.de, Ihlemann, J.1
Source: Applied Physics A: Materials Science & Processing. Nov2010, Vol. 101 Issue 3, p533-538. 6p. 1 Black and White Photograph, 1 Diagram, 1 Graph.
Database: Academic Search Ultimate
Description
ISSN:09478396
DOI:10.1007/s00339-010-5892-9