Non-Linear Effects of Ti Emission on TiN Film Deposition.
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| Title: | Non-Linear Effects of Ti Emission on TiN Film Deposition. |
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| Authors: | Chan, Marvin, Xu, S., Jiang, N., Long, J., Diong, C. H. |
| Source: | International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics. 1/20/2002, Vol. 16 Issue 1/2, p254. 7p. |
| Database: | Academic Search Ultimate |
| ISSN: | 02179792 |
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| DOI: | 10.1142/S021797920200972X |
