APA (7th ed.) Citation

Chan, M., Xu, S., Jiang, N., Long, J., & Diong, C. H. (2002). Non-Linear Effects of Ti Emission on TiN Film Deposition. International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics, 16(1/2), 254. https://doi.org/10.1142/S021797920200972X

Chicago Style (17th ed.) Citation

Chan, Marvin, S. Xu, N. Jiang, J. Long, and C. H. Diong. "Non-Linear Effects of Ti Emission on TiN Film Deposition." International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics 16, no. 1/2 (2002): 254. https://doi.org/10.1142/S021797920200972X.

MLA (9th ed.) Citation

Chan, Marvin, et al. "Non-Linear Effects of Ti Emission on TiN Film Deposition." International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics, vol. 16, no. 1/2, 2002, p. 254, https://doi.org/10.1142/S021797920200972X.