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Non-Linear Effects of Ti Emission on TiN Film Deposition.

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Bibliographic Details
Title: Non-Linear Effects of Ti Emission on TiN Film Deposition.
Authors: Chan, Marvin, Xu, S., Jiang, N., Long, J., Diong, C. H.
Source: International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics. 1/20/2002, Vol. 16 Issue 1/2, p254. 7p.
Database: Academic Search Ultimate
FullText Text:
  Availability: 0
Header DbId: asn
DbLabel: Academic Search Ultimate
An: 7229087
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Non-Linear Effects of Ti Emission on TiN Film Deposition.
– Name: Author
  Label: Authors
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  Data: <searchLink fieldCode="AR" term="%22Chan%2C+Marvin%22">Chan, Marvin</searchLink><br /><searchLink fieldCode="AR" term="%22Xu%2C+S%2E%22">Xu, S.</searchLink><br /><searchLink fieldCode="AR" term="%22Jiang%2C+N%2E%22">Jiang, N.</searchLink><br /><searchLink fieldCode="AR" term="%22Long%2C+J%2E%22">Long, J.</searchLink><br /><searchLink fieldCode="AR" term="%22Diong%2C+C%2E+H%2E%22">Diong, C. H.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22International+Journal+of+Modern+Physics+B%3A+Condensed+Matter+Physics%3B+Statistical+Physics%3B+Applied+Physics%22">International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics</searchLink>. 1/20/2002, Vol. 16 Issue 1/2, p254. 7p.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=7229087
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1142/S021797920200972X
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      – Code: eng
        Text: English
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        PageCount: 7
        StartPage: 254
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      – TitleFull: Non-Linear Effects of Ti Emission on TiN Film Deposition.
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            NameFull: Chan, Marvin
      – PersonEntity:
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            NameFull: Xu, S.
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            NameFull: Jiang, N.
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            NameFull: Long, J.
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            NameFull: Diong, C. H.
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              M: 01
              Text: 1/20/2002
              Type: published
              Y: 2002
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              Value: 16
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              Value: 1/2
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            – TitleFull: International Journal of Modern Physics B: Condensed Matter Physics; Statistical Physics; Applied Physics
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