Microcavity Interferometry for MEMS Device Characterization.
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| Title: | Microcavity Interferometry for MEMS Device Characterization. |
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| Authors: | Stievater, Todd H., Rabinovich, William S., Newman, Harvey S., Ebel, Jack L., Mahon, Rita, McGee, David J., Goetz, Peter G. |
| Source: | Journal of Microelectromechanical Systems. Feb2003, Vol. 12 Issue 1, p109. 8p. 6 Black and White Photographs, 1 Diagram, 12 Graphs. |
| Database: | Academic Search Ultimate |
| ISSN: | 10577157 |
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| DOI: | 10.1109/JMEMS.2002.807465 |
