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Design and Performance Analysis of Dual Straight Beam MEMS Micro Mirrors for Enhanced Scanning Capabilities.

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Title: Design and Performance Analysis of Dual Straight Beam MEMS Micro Mirrors for Enhanced Scanning Capabilities.
Authors: ZHANG, Lin1, WANG, Qian1, XIA, Yuanlin2 yuanlin.xia@scu.edu.cn, XIA, YanTing1, ZHONG, Lei2
Source: Technical Gazette / Tehnički Vjesnik. Oct2025, Vol. 32 Issue 5, p1631-1638. 8p.
Subjects: Micromirrors, Scanning systems, Finite element method, Structural optimization, Optical communications, Structural design
Abstract: Micro-Opto-Electro-Mechanical Systems (MOEMS) technology is rapidly developing, with micro scanning devices centered around MEMS micro-mirrors increasingly becoming a research focus. Addressing the shortcomings of single-cantilever MEMS micro-mirrors, which suffer from high beam stress, small scanning angles, and inadequate frequency response, the study proposes a novel dual axis micro mirror with a dual straight beam structure to address limitations in current MEMS micro mirror designs. Using COMSOL finite element software, we optimized the structural dimensions and conducted performance simulations. The proposed design achieves a fast axis resonant frequency of 4397 Hz with a maximum scanning angle of 31°, and a slow axis resonant frequency of 422.3 Hz with a maximum scanning angle of 50.2°. Compared to single beam structures, our design demonstrates 17.2% and 18.7% stress reduction for fast and slow axis scanning respectively, under equivalent deflection. This dual straight beam MEMS micro mirror offers improved mechanical deflection performance, reduced crosstalk, and enhanced scanning capabilities, contributing to advancements in optical systems and scientific exploration. [ABSTRACT FROM AUTHOR]
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Database: Engineering Source
Description
Abstract:Micro-Opto-Electro-Mechanical Systems (MOEMS) technology is rapidly developing, with micro scanning devices centered around MEMS micro-mirrors increasingly becoming a research focus. Addressing the shortcomings of single-cantilever MEMS micro-mirrors, which suffer from high beam stress, small scanning angles, and inadequate frequency response, the study proposes a novel dual axis micro mirror with a dual straight beam structure to address limitations in current MEMS micro mirror designs. Using COMSOL finite element software, we optimized the structural dimensions and conducted performance simulations. The proposed design achieves a fast axis resonant frequency of 4397 Hz with a maximum scanning angle of 31°, and a slow axis resonant frequency of 422.3 Hz with a maximum scanning angle of 50.2°. Compared to single beam structures, our design demonstrates 17.2% and 18.7% stress reduction for fast and slow axis scanning respectively, under equivalent deflection. This dual straight beam MEMS micro mirror offers improved mechanical deflection performance, reduced crosstalk, and enhanced scanning capabilities, contributing to advancements in optical systems and scientific exploration. [ABSTRACT FROM AUTHOR]
ISSN:13303651
DOI:10.17559/TV-20240712001841