Understanding the Mechanism of Electronic Defect Suppression Enabled by Nonidealities in Atomic Layer Deposition.

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Bibliographic Details
Title: Understanding the Mechanism of Electronic Defect Suppression Enabled by Nonidealities in Atomic Layer Deposition.
Authors: Kavrik MS; Materials Science and Engineering , University of California San Diego , La Jolla , California 92093 , United States., Bostwick A; Advanced Light Source (ALS) , E. O. Lawrence Berkeley Laboratory , Berkeley , California United States., Rotenberg E; Advanced Light Source (ALS) , E. O. Lawrence Berkeley Laboratory , Berkeley , California United States., Tang K; Materials Science and Engineering , Stanford University , Stanford , California 94305 , United States., Thomson E; Materials Science and Engineering , University of California San Diego , La Jolla , California 92093 , United States., Aoki T; Irvine Materials Research Institute , University of California Irvine , Irvine , California , United States., Fruhberger B; California Institute for Telecommunications and Information Technology , University of California San Diego , La Jolla , California 92093 , United States., Taur Y; Materials Science and Engineering , University of California San Diego , La Jolla , California 92093 , United States., McIntyre PC; Materials Science and Engineering , Stanford University , Stanford , California 94305 , United States., Kummel AC; Materials Science and Engineering , University of California San Diego , La Jolla , California 92093 , United States.
Source: Journal of the American Chemical Society [J Am Chem Soc] 2020 Jan 08; Vol. 142 (1), pp. 134-145. Date of Electronic Publication: 2019 Dec 26.
Publication Type: Journal Article
Journal Info: Publisher: American Chemical Society Country of Publication: United States NLM ID: 7503056 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1520-5126 (Electronic) Linking ISSN: 00027863 NLM ISO Abbreviation: J Am Chem Soc Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:1520-5126
DOI:10.1021/jacs.9b06640