Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT.
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| Title: | Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT. |
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| Authors: | Nazemi H; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Antony Balasingam J; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Swaminathan S; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Ambrose K; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Nathani MU; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Ahmadi T; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., B Lopez Y; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Emadi A; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada. |
| Source: | Sensors (Basel, Switzerland) [Sensors (Basel)] 2020 Apr 03; Vol. 20 (7). Date of Electronic Publication: 2020 Apr 03. |
| Publication Type: | Journal Article; Review |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101204366 Publication Model: Electronic Cited Medium: Internet ISSN: 1424-8220 (Electronic) Linking ISSN: 14248220 NLM ISO Abbreviation: Sensors (Basel) Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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| ISSN: | 1424-8220 |
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| DOI: | 10.3390/s20072010 |
