Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT.

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Title: Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT.
Authors: Nazemi H; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Antony Balasingam J; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Swaminathan S; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Ambrose K; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Nathani MU; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Ahmadi T; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., B Lopez Y; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada., Emadi A; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
Source: Sensors (Basel, Switzerland) [Sensors (Basel)] 2020 Apr 03; Vol. 20 (7). Date of Electronic Publication: 2020 Apr 03.
Publication Type: Journal Article; Review
Journal Info: Publisher: MDPI Country of Publication: Switzerland NLM ID: 101204366 Publication Model: Electronic Cited Medium: Internet ISSN: 1424-8220 (Electronic) Linking ISSN: 14248220 NLM ISO Abbreviation: Sensors (Basel) Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT.
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  Data: <searchLink fieldCode="AU" term="%22Nazemi+H%22">Nazemi H</searchLink>; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.<br /><searchLink fieldCode="AU" term="%22Antony+Balasingam+J%22">Antony Balasingam J</searchLink>; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.<br /><searchLink fieldCode="AU" term="%22Swaminathan+S%22">Swaminathan S</searchLink>; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.<br /><searchLink fieldCode="AU" term="%22Ambrose+K%22">Ambrose K</searchLink>; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.<br /><searchLink fieldCode="AU" term="%22Nathani+MU%22">Nathani MU</searchLink>; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.<br /><searchLink fieldCode="AU" term="%22Ahmadi+T%22">Ahmadi T</searchLink>; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.<br /><searchLink fieldCode="AU" term="%22B+Lopez+Y%22">B Lopez Y</searchLink>; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.<br /><searchLink fieldCode="AU" term="%22Emadi+A%22">Emadi A</searchLink>; Department of Electrical and Computer Engineering, University of Windsor, Windsor, ON N9B 3P4, Canada.
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  Data: <searchLink fieldCode="JN" term="%22101204366%22">Sensors (Basel, Switzerland)</searchLink> [Sensors (Basel)] 2020 Apr 03; Vol. 20 (7). <i>Date of Electronic Publication: </i>2020 Apr 03.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22MDPI%22">MDPI </searchLink><i>Country of Publication: </i>Switzerland <i>NLM ID: </i>101204366 <i>Publication Model: </i>Electronic <i>Cited Medium: </i>Internet <i>ISSN: </i>1424-8220 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2214248220%22">14248220 </searchLink><i>NLM ISO Abbreviation: </i>Sensors (Basel) <i>Subsets: </i>MEDLINE; PubMed not MEDLINE
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        Value: 10.3390/s20072010
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        Text: English
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      – TitleFull: Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT.
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              Text: 2020 Apr 03
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              Y: 2020
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