Link between Gas Phase Reaction Chemistry and the Electronic Conductivity of Atomic Layer Deposited Titanium Oxide Thin Films.
Saved in:
| Title: | Link between Gas Phase Reaction Chemistry and the Electronic Conductivity of Atomic Layer Deposited Titanium Oxide Thin Films. |
|---|---|
| Authors: | Babadi AS; Department of Materials Science & Engineering, Stanford University, Stanford, California 94305, United States., Tang-Kong R; Department of Materials Science & Engineering, Stanford University, Stanford, California 94305, United States., McIntyre PC; Department of Materials Science & Engineering, Stanford University, Stanford, California 94305, United States. |
| Source: | The journal of physical chemistry letters [J Phys Chem Lett] 2021 Apr 15; Vol. 12 (14), pp. 3625-3632. Date of Electronic Publication: 2021 Apr 07. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: American Chemical Society Country of Publication: United States NLM ID: 101526034 Publication Model: Print-Electronic Cited Medium: Internet ISSN: 1948-7185 (Electronic) Linking ISSN: 19487185 NLM ISO Abbreviation: J Phys Chem Lett Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| ISSN: | 1948-7185 |
|---|---|
| DOI: | 10.1021/acs.jpclett.1c00115 |
