Fluorescent nanodiamond scintillators for beam diagnostics of EUV and soft X-ray in photolithographic applications.

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Bibliographic Details
Title: Fluorescent nanodiamond scintillators for beam diagnostics of EUV and soft X-ray in photolithographic applications.
Authors: Hui YY; Institute of Atomic and Molecular Sciences, Academia Sinica Taipei 106 Taiwan hchang@gate.sinica.edu.tw., Ho CY; Institute of Atomic and Molecular Sciences, Academia Sinica Taipei 106 Taiwan hchang@gate.sinica.edu.tw., Yang TI; Taiwan Instrument Research Institute, National Applied Research Laboratories Hsinchu City 300092 Taiwan., Huang TP; National Synchrotron Radiation Research Center Hsinchu City 300092 Taiwan., Cheng BM; Department of Medical Research, Hualien Tzu Chi Hospital, Buddhist Tzu Chi Medical Foundation Hualien City 970 Taiwan.; Center for General Education, Tzu Chi University Hualien City 970 Taiwan., Lee YY; National Synchrotron Radiation Research Center Hsinchu City 300092 Taiwan., Chang HC; Institute of Atomic and Molecular Sciences, Academia Sinica Taipei 106 Taiwan hchang@gate.sinica.edu.tw.; Department of Chemical Engineering, National Taiwan University of Science and Technology Taipei City 106335 Taiwan.; Department of Chemistry, National Taiwan Normal University Taipei City 106 Taiwan.
Source: RSC advances [RSC Adv] 2025 Jan 13; Vol. 15 (2), pp. 1011-1019. Date of Electronic Publication: 2025 Jan 13 (Print Publication: 2025).
Publication Type: Journal Article
Journal Info: Publisher: Royal Society of Chemistry Country of Publication: England NLM ID: 101581657 Publication Model: eCollection Cited Medium: Internet ISSN: 2046-2069 (Electronic) Linking ISSN: 20462069 NLM ISO Abbreviation: RSC Adv Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:2046-2069
DOI:10.1039/d4ra08013k