Analysis of Structural Design Variations in MEMS Capacitive Microphones.
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| Title: | Analysis of Structural Design Variations in MEMS Capacitive Microphones. |
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| Authors: | Peng TH; Ph.D. Program of Mechanical and Aeronautical Engineering, Feng Chia University, Taichung 407102, Taiwan., Hsu HJ; Qsensing Microelectronics Co., Ltd., Shenzhen 518556, China., Huang JH; Department of Mechanical and Computer-Aided Engineering, Feng Chia University, Taichung 407102, Taiwan. |
| Source: | Sensors (Basel, Switzerland) [Sensors (Basel)] 2025 Feb 02; Vol. 25 (3). Date of Electronic Publication: 2025 Feb 02. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101204366 Publication Model: Electronic Cited Medium: Internet ISSN: 1424-8220 (Electronic) Linking ISSN: 14248220 NLM ISO Abbreviation: Sensors (Basel) Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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| ISSN: | 1424-8220 |
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| DOI: | 10.3390/s25030900 |
