In Situ Time-Based Sensor for Process Identification Using Amplified Back-End-of-Line Resistance and Capacitance.
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| Title: | In Situ Time-Based Sensor for Process Identification Using Amplified Back-End-of-Line Resistance and Capacitance. |
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| Authors: | Hsueh JC; Electroscience Laboratory, Ohio State University, Columbus, OH 43212, USA., Kines M; Electroscience Laboratory, Ohio State University, Columbus, OH 43212, USA., Tantawy YA; Electroscience Laboratory, Ohio State University, Columbus, OH 43212, USA., Smith DS; Electroscience Laboratory, Ohio State University, Columbus, OH 43212, USA., McCue J; U.S. Air Force Research Laboratory, Dayton, OH 45433, USA., Dupaix B; U.S. Air Force Research Laboratory, Dayton, OH 45433, USA., Patel VJ; Ansys, Inc., Exton, PA 19341, USA., Khalil W; Electroscience Laboratory, Ohio State University, Columbus, OH 43212, USA. |
| Source: | Sensors (Basel, Switzerland) [Sensors (Basel)] 2025 May 22; Vol. 25 (11). Date of Electronic Publication: 2025 May 22. |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: MDPI Country of Publication: Switzerland NLM ID: 101204366 Publication Model: Electronic Cited Medium: Internet ISSN: 1424-8220 (Electronic) Linking ISSN: 14248220 NLM ISO Abbreviation: Sensors (Basel) Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
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| ISSN: | 1424-8220 |
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| DOI: | 10.3390/s25113255 |
