Self-aligned and self-limiting van der Waals epitaxy of monolayer MoS2 for scalable 2D electronics.

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Title: Self-aligned and self-limiting van der Waals epitaxy of monolayer MoS2 for scalable 2D electronics.
Authors: Sakuma Y; Research Center for Electronic and Optical Materials, National Institute for Materials Science, Tsukuba, Japan. sakuma.yoshiki@nims.go.jp., Atsumi K; Department of Materials Engineering, The University of Tokyo, Tokyo, Japan., Hiroto T; Research Network and Facility Services Division, National Institute for Materials Science, Tsukuba, Japan., Nara J; Research Center for Materials Nanoarchitectonics, National Institute for Materials Science, Tsukuba, Japan., Ohtake A; Research Center for Electronic and Optical Materials, National Institute for Materials Science, Tsukuba, Japan., Ono Y; Tokyo Electron Technology Solutions Limited, Hosaka-cho, Nirasaki, Japan., Matsumoto T; Tokyo Electron Technology Solutions Limited, Hosaka-cho, Nirasaki, Japan., Muta Y; Tokyo Electron Technology Solutions Limited, Hosaka-cho, Nirasaki, Japan., Takeda K; Tokyo Electron Technology Solutions Limited, Hosaka-cho, Nirasaki, Japan., Kano E; Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Japan., Yasuno T; Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Japan., Yang X; Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Japan., Ikarashi N; Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya, Japan., Suzuki A; Department of Physics, University of Tsukuba, Tsukuba, Japan., Ikezawa M; Department of Physics, University of Tsukuba, Tsukuba, Japan., Li S; Department of Materials Engineering, The University of Tokyo, Tokyo, Japan., Nishimura T; Department of Materials Engineering, The University of Tokyo, Tokyo, Japan., Kanahashi K; Department of Materials Engineering, The University of Tokyo, Tokyo, Japan., Nagashio K; Department of Materials Engineering, The University of Tokyo, Tokyo, Japan. nagashio@material.t.u-tokyo.ac.jp.
Source: Nature communications [Nat Commun] 2026 Jan 21; Vol. 17 (1), pp. 602. Date of Electronic Publication: 2026 Jan 21.
Publication Type: Journal Article
Journal Info: Publisher: Nature Pub. Group Country of Publication: England NLM ID: 101528555 Publication Model: Electronic Cited Medium: Internet ISSN: 2041-1723 (Electronic) Linking ISSN: 20411723 NLM ISO Abbreviation: Nat Commun Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
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ISSN:2041-1723
DOI:10.1038/s41467-026-68320-8