A review of glass thermal reflow: method, device, and applications.

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Title: A review of glass thermal reflow: method, device, and applications.
Authors: Zhu M; Instrumentation Technology and Economy Institute, Beijing, 100055, China. zmj@tc124.com., Shi P; Guangdong Provincial Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics and School of Robotics and Advanced Manufacture, Harbin Institute of Technology, Shenzhen, 518052, China., Zhang G; Instrumentation Technology and Economy Institute, Beijing, 100055, China., Yan C; Guangdong Provincial Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics and School of Robotics and Advanced Manufacture, Harbin Institute of Technology, Shenzhen, 518052, China., Chen F; Instrumentation Technology and Economy Institute, Beijing, 100055, China., Liu S; Instrumentation Technology and Economy Institute, Beijing, 100055, China., Lian R; Instrumentation Technology and Economy Institute, Beijing, 100055, China., Zhu K; Instrumentation Technology and Economy Institute, Beijing, 100055, China., Dai H; Guangdong Provincial Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics and School of Robotics and Advanced Manufacture, Harbin Institute of Technology, Shenzhen, 518052, China., Wu H; Guangdong Provincial Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics and School of Robotics and Advanced Manufacture, Harbin Institute of Technology, Shenzhen, 518052, China., Liu Y; Guangdong Provincial Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics and School of Robotics and Advanced Manufacture, Harbin Institute of Technology, Shenzhen, 518052, China., Li B; Guangdong Provincial Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics and School of Robotics and Advanced Manufacture, Harbin Institute of Technology, Shenzhen, 518052, China., Du X; Instrumentation Technology and Economy Institute, Beijing, 100055, China., Xue G; Guangdong Provincial Key Laboratory of Intelligent Morphing Mechanisms and Adaptive Robotics and School of Robotics and Advanced Manufacture, Harbin Institute of Technology, Shenzhen, 518052, China. xuegaopeng@hit.edu.cn.
Source: Microsystems & nanoengineering [Microsyst Nanoeng] 2026 May 13; Vol. 12 (1). Date of Electronic Publication: 2026 May 13.
Publication Type: Journal Article; Review
Journal Info: Publisher: Nature Publishing Group Country of Publication: England NLM ID: 101695458 Publication Model: Electronic Cited Medium: Internet ISSN: 2055-7434 (Electronic) Linking ISSN: 20557434 NLM ISO Abbreviation: Microsyst Nanoeng Subsets: PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:2055-7434
DOI:10.1038/s41378-026-01239-8