Design and performance of AI agents interfacing with an atomic layer deposition tool.
Saved in:
| Title: | Design and performance of AI agents interfacing with an atomic layer deposition tool. |
|---|---|
| Authors: | Yanguas-Gil A; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA., Jones JC; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA., Kim S; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA., Nguyen CT; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA., Elam JW; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA. |
| Source: | The Review of scientific instruments [Rev Sci Instrum] 2026 May 01; Vol. 97 (5). |
| Publication Type: | Journal Article |
| Journal Info: | Publisher: American Institute Of Physics Country of Publication: United States NLM ID: 0405571 Publication Model: Print Cited Medium: Internet ISSN: 1089-7623 (Electronic) Linking ISSN: 00346748 NLM ISO Abbreviation: Rev Sci Instrum Subsets: MEDLINE; PubMed not MEDLINE |
| Database: | MEDLINE Ultimate |
| ISSN: | 1089-7623 |
|---|---|
| DOI: | 10.1063/5.0318770 |
