APA (7th ed.) Citation

A, Y., JC, J., S, K., CT, N., & JW, E. (2026). Design and performance of AI agents interfacing with an atomic layer deposition tool. The Review of scientific instruments, 97(5), . https://doi.org/10.1063/5.0318770

Chicago Style (17th ed.) Citation

A, Yanguas-Gil, Jones JC, Kim S, Nguyen CT, and Elam JW. "Design and Performance of AI Agents Interfacing with an Atomic Layer Deposition Tool." The Review of Scientific Instruments 97, no. 5 (2026). https://doi.org/10.1063/5.0318770.

MLA (9th ed.) Citation

A, Yanguas-Gil, et al. "Design and Performance of AI Agents Interfacing with an Atomic Layer Deposition Tool." The Review of Scientific Instruments, vol. 97, no. 5, 2026, https://doi.org/10.1063/5.0318770.