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Design and performance of AI agents interfacing with an atomic layer deposition tool.

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Title: Design and performance of AI agents interfacing with an atomic layer deposition tool.
Authors: Yanguas-Gil A; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA., Jones JC; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA., Kim S; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA., Nguyen CT; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA., Elam JW; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA.
Source: The Review of scientific instruments [Rev Sci Instrum] 2026 May 01; Vol. 97 (5).
Publication Type: Journal Article
Journal Info: Publisher: American Institute Of Physics Country of Publication: United States NLM ID: 0405571 Publication Model: Print Cited Medium: Internet ISSN: 1089-7623 (Electronic) Linking ISSN: 00346748 NLM ISO Abbreviation: Rev Sci Instrum Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
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  Data: Design and performance of AI agents interfacing with an atomic layer deposition tool.
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  Data: <searchLink fieldCode="AU" term="%22Yanguas-Gil+A%22">Yanguas-Gil A</searchLink>; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA.<br /><searchLink fieldCode="AU" term="%22Jones+JC%22">Jones JC</searchLink>; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA.<br /><searchLink fieldCode="AU" term="%22Kim+S%22">Kim S</searchLink>; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA.<br /><searchLink fieldCode="AU" term="%22Nguyen+CT%22">Nguyen CT</searchLink>; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA.<br /><searchLink fieldCode="AU" term="%22Elam+JW%22">Elam JW</searchLink>; Argonne National Laboratory, Applied Materials Division, Lemont, Illinois 60439, USA.
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22American+Institute+Of+Physics%22">American Institute Of Physics </searchLink><i>Country of Publication: </i>United States <i>NLM ID: </i>0405571 <i>Publication Model: </i>Print <i>Cited Medium: </i>Internet <i>ISSN: </i>1089-7623 (Electronic) <i>Linking ISSN: </i><searchLink fieldCode="IS" term="%2200346748%22">00346748 </searchLink><i>NLM ISO Abbreviation: </i>Rev Sci Instrum <i>Subsets: </i>MEDLINE; PubMed not MEDLINE
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        Value: 10.1063/5.0318770
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        Text: English
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      – TitleFull: Design and performance of AI agents interfacing with an atomic layer deposition tool.
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            NameFull: Yanguas-Gil A
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            NameFull: Kim S
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            NameFull: Nguyen CT
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            – D: 01
              M: 05
              Text: 2026 May 01
              Type: published
              Y: 2026
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              Value: 97
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