Surface profile measurement using heterodyne moiré signals with an adjustable grating period.

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Bibliographic Details
Title: Surface profile measurement using heterodyne moiré signals with an adjustable grating period.
Authors: Chen KH, Tsai CH, Hung SC, Chen JH
Source: Applied optics [Appl Opt] 2026 May 20; Vol. 65 (15), pp. G10-G16.
Publication Type: Journal Article
Journal Info: Publisher: Optica Publishing Group Country of Publication: United States NLM ID: 0247660 Publication Model: Print Cited Medium: Internet ISSN: 1539-4522 (Electronic) Linking ISSN: 1559128X NLM ISO Abbreviation: Appl Opt Subsets: MEDLINE; PubMed not MEDLINE
Database: MEDLINE Ultimate
Description
ISSN:1539-4522
DOI:10.1364/AO.583392