Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023).
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| Title: | Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023). |
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| Authors: | Gries, Stella, Brinker, Manuel, Zeller‐Plumhoff, Berit, Rings, Dagmar, Krekeler, Tobias, Longo, Elena, Greving, Imke, Huber, Patrick |
| Source: | Small Jun2023; Vol. 19 (22). |
| Journal Info: | Publisher: Wiley-Blackwell ISSN: 1613-6810 |
| Database: | MEDLINE Ultimate |
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| ISSN: | 1613-6829 |
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| DOI: | 10.1002/smll.202370157 |
