Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023).

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Title: Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023).
Authors: Gries, Stella, Brinker, Manuel, Zeller‐Plumhoff, Berit, Rings, Dagmar, Krekeler, Tobias, Longo, Elena, Greving, Imke, Huber, Patrick
Source: Small Jun2023; Vol. 19 (22).
Journal Info: Publisher: Wiley-Blackwell ISSN: 1613-6810
Database: MEDLINE Ultimate
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An: EPTOC164063704
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  Data: Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023).
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  Data: <searchLink fieldCode="AU" term="%22Gries%2C+Stella%22">Gries, Stella</searchLink><br /><searchLink fieldCode="AU" term="%22Brinker%2C+Manuel%22">Brinker, Manuel</searchLink><br /><searchLink fieldCode="AU" term="%22Zeller‐Plumhoff%2C+Berit%22">Zeller‐Plumhoff, Berit</searchLink><br /><searchLink fieldCode="AU" term="%22Rings%2C+Dagmar%22">Rings, Dagmar</searchLink><br /><searchLink fieldCode="AU" term="%22Krekeler%2C+Tobias%22">Krekeler, Tobias</searchLink><br /><searchLink fieldCode="AU" term="%22Longo%2C+Elena%22">Longo, Elena</searchLink><br /><searchLink fieldCode="AU" term="%22Greving%2C+Imke%22">Greving, Imke</searchLink><br /><searchLink fieldCode="AU" term="%22Huber%2C+Patrick%22">Huber, Patrick</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22101235338%22">Small</searchLink> Jun2023; Vol. 19 (22).
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  Data: <i>Publisher: </i><searchLink fieldCode="PB" term="%22Wiley-Blackwell%22">Wiley-Blackwell </searchLink><i>ISSN: </i>1613-6810
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      – Type: doi
        Value: 10.1002/smll.202370157
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      – Code: eng
        Text: English
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      – TitleFull: Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation (Small 22/2023).
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            NameFull: Gries, Stella
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            NameFull: Brinker, Manuel
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            NameFull: Zeller‐Plumhoff, Berit
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            NameFull: Rings, Dagmar
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            NameFull: Krekeler, Tobias
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            NameFull: Longo, Elena
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            NameFull: Greving, Imke
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            NameFull: Huber, Patrick
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            – D: 01
              M: 06
              Text: Jun2023
              Type: published
              Y: 2023
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