Scanning electron microscopy : physics of image formation and microanalysis /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Springer,
1998.
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| Edition: | 2nd edition |
| Subjects: | |
| Notas Contenido: |
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Table of Contents:
- Introduction
- Electron optics of a scanning electron microscope
- Electron scattering and diffusion
- Emission of backscattered and secondary electrons
- Electron detectors and spectrometers
- Image contrast and signal processing
- electron-Beam-induced current and cathodoluminescence
- Special techniques in SEM
- Crystal structure analysis by diffraction
- Elemental analysis and imaging with X-rays
